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Proximity Doping for Silicon Structures
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Long-term passivation stability of Phosphorus-doped polysilicon samples
Invention Summary:
In semiconductor industries, Spin-on-dopants (SOD) are being used as an alternative to conventional solution for forming doped poly-Si junctions and homogeneously diffused junctions. However, SOD also has its own limitation; Organic residues remained...
Published: 9/16/2024
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Inventor(s): Ngwe Zin, Vibhor Kumar, Munan Gao
Keywords(s):
Category(s): Technology Classifications > Electronics/Semiconductor, Technology Classifications > Energy & Battery, Technology Classifications > Physical Sciences & Engineering
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