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High Resolution, Real-Time Flatness and Thermal Expansion Metrology
Schematic of surface curvature measurement and thermal expansion measurement apparatus Invention Summary: During manufacturing of thin films and semiconductors, it is critical to monitor the flatness and thermal expansion of samples to identify and manage stresses. These parameters are currently measured optically based on the deflection of multiple...
Published: 5/12/2017   |   Inventor(s): Alexei Ermakov, Xiuyan Li, Eric Garfunkel, Leonard Feldman, Torgny Gustafsson
Keywords(s): Machines & Instruments
Category(s): Technology Classifications > Physical Sciences & Engineering, Technology Classifications > Research Tools