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Nanoscale 3D Thermal Metrology via Scanning Electron Resistance Thermometry (SE-TherM)
(A) SEM image and (B) Temperature map of the device under test
Invention Summary:
It can be difficult to measure thermal properties at the nanoscale on operating microelectronics in a nondestructive, non-contact and real-time manner. The lack of such nanoscale thermal metrology tools affects quality control in modern microelectronics and...
Published: 10/15/2025
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Inventor(s): Amin Reihani
Keywords(s):
Category(s): Technology Classifications > Electronics/Semiconductor, Technology Classifications > Nanotechnology, Technology Classifications > Physical Sciences & Engineering, Technology Classifications > Research Tools, Technology Classifications > Sensors
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Real-Time Battery Health and Charge Diagnosis via Thermal Conductivity/Diffusivity Analysis
A flexible thin-film sensor is installed on a LIB cell for the thermal conductivity/diffusivity measurement. The sensor has patterns that can deposit heat and measure local temperature simultaneously.
Invention Summary:
The reliable measurement of a battery’s state of health (SOH) and state of charge (SOC) is critical in battery management...
Published: 12/3/2024
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Inventor(s): Amin Reihani
Keywords(s):
Category(s): Technology Classifications > Energy & Battery, Technology Classifications > Physical Sciences & Engineering, Technology Classifications > Sensors, Technology Classifications > Software & Algorithms, Technology Classifications > Research Tools
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Ultra-high-resolution micro-thermometer using Tunneling-Diffusion Edge Sensor (TDES)
High-resolution room-temperature thermometers described in the literature as a function of their resolution and footprint area. Highlighted area shows microscale and nanokelvin resolution. The projected resolution and footprint of the proposed Tunneling-Diffusion Edge Sensor (TDES) are marked in blue.
Invention Summary:
Ultrahigh-resolution thermometry...
Published: 6/13/2024
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Inventor(s): Amin Reihani
Keywords(s):
Category(s): Technology Classifications > Physical Sciences & Engineering, Technology Classifications > Sensors
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